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Reactive Sputter Deposition [electronic resource] / edited by Diederik Depla, Stijn Mahieu.

Contributor(s): Series: Springer Series in Materials Science ; 109Publication details: Berlin, Heidelberg : Springer-Verlag Berlin Heidelberg, 2008.Description: xviii, 570 p. : ill. (some col.), digital ; 25 cmISBN:
  • 9783540766643 (electronic bk.)
  • 9783540766629 (paper)
Subject(s): DDC classification:
  • 621.38152 22
Online resources: In: Springer eBooks
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