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	1.	The science and engineering of microelectronic fabrication / Stephen A. Campbell. by Campbell, Stephen A, 1954- Publication details: New York : Oxford University Press , 1996 Availability: Items available for loan: PERPUSTAKAAN LINGKUNGAN KEDUA (1)Call number: TK7871.85.C25. Place hold
	2.	The science and engineering of microelectronic fabrication / Stephen A. Campbell by Campbell, Stephen A, 1954- Series: The Oxford series in electrical and computer engineering Edition: 2nd ed. Publication details: New York : Oxford University Press, 2001 Online resources: Publisher description Table of contents Availability: Items available for loan: PERPUSTAKAAN LINGKUNGAN KEDUA (1)Call number: TK7871.85.C25 2001 3. Place hold

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