Nanolithography and patterning techniques in microelectonics / edited by David G. Bucknall

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Series: Woodhead Publishing in materialsPublication details: Cambridge, England : Woodhead Pub., 2005Description: xiv, 409 p. : ill. ; 24 cmISBN:

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Item type	Current library	Home library	Collection	Call number	Materials specified	Copy number	Status	Date due	Barcode
AM	PERPUSTAKAAN LINGKUNGAN KEDUA	PERPUSTAKAAN LINGKUNGAN KEDUA KOLEKSI AM-P. LINGKUNGAN KEDUA	-	TK7874.N328 3 (Browse shelf(Opens below))		1	Available		00001469480
AM	PERPUSTAKAAN LINGKUNGAN KEDUA	PERPUSTAKAAN LINGKUNGAN KEDUA KOLEKSI AM-P. LINGKUNGAN KEDUA	-	TK7874.N328 3 (Browse shelf(Opens below))	n. 2	1	Available		00001499106

Includes bibliographical references and index

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