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Fast Simulation of Electro-Thermal MEMS [electronic resource] : Efficient Dynamic Compact Models / by Tamara Bechtold, Evgenii B. Rudnyi, Jan G. Korvink.

By: Contributor(s): Publication details: Berlin, Heidelberg : Springer-Verlag Berlin Heidelberg, 2007.Description: 1online resource (xi, 180 p.) : ill. (some col.), digital ; 24 cmISBN:
  • 9783540346135 (electronic bk.)
  • 9783540346128 (paper)
Subject(s): DDC classification:
  • 621.381 22
LOC classification:
  • TK7875 .B43 2007
Online resources: In: Springer e-books
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