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Sputtered silicon encapsulation : wafer level packaging for MEMs devices / Azrul Azlan Bin Hamzah by
Publication details: Bangi : Institut Kejuruteraan Mikro dan Nanoelektronik, Universiti Kebangsaan Malaysia, 2008
Dissertation note: Thesis (Ph.D) - Universiti Kebangsaan Malaysia, 2008
Availability: Items available for loan: PERPUSTAKAAN LINGKUNGAN KEDUA (1)Call number: TK7874.A9978 2008 3tesis.

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