Predictive simulation of semiconductor processing : status and challenges / J. Dabrowski, E.R. Weber (eds.).

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Series: Springer series in materials science ; v. 72.Publication details: Berlin : Springer-Verlag, 2004.Description: xvii, 490 p. : ill. (some col.) ; 24 cmISBN:

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Item type	Current library	Home library	Collection	Call number	Materials specified	Copy number	Status	Date due	Barcode
AM	PERPUSTAKAAN LINGKUNGAN KEDUA	PERPUSTAKAAN LINGKUNGAN KEDUA KOLEKSI AM-P. LINGKUNGAN KEDUA	-	TK7871.85.P73 3 (Browse shelf(Opens below))		1	Available		00001364471

Includes bibliographical references and index.

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