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	1.	Thin film processes / edited by John L. Vossen, Werner Kern. by Vossen, John L Kern, Werner, 1925- Publication details: New York : Academic Press, 1978 Availability: Items available for loan: PERPUSTAKAAN TUN SERI LANANG (1)Call number: TK7871.15.F5 T43. Place hold
	2.	Handbook of silicon wafer cleaning technology / edited by Karen A. Reinhardt, Werner Kern by Reinhardt, Karen A Kern, Werner, 1925- Series: Materials science and process technology series Edition: 2nd ed. Publication details: Norwich, New York : William Andrew, 2008 Availability: Items available for loan: PERPUSTAKAAN TUN SERI LANANG (1)Call number: TK7871.85.H366 2008 3. Place hold

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