TY  - BOOK
AU  - Glocker,D.
AU  - Shah,S.Ismat
TI  - Handbook of thin film process technology
SN  - 0750303115
PY  - 1995///
CY  - Bristol
PB  - Institute of Physics
KW  - Thin films
KW  - Handbooks, manual, etc
KW  - Surfaces (Technology)
ER  -