Handbook of thin film process technology / 
editors, David A Glocker , S Ismat Shah. 
 - Bristol :  Institute of Physics,  1995. 
 - 1 v. (various pagings) :  ill. ;  32 cm. 
<br/><br/><label>ISBN: </label>0750303115  RM1,033.72 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Thin films--Handbooks, manual, etc.<br/>Surfaces (Technology)--Handbooks, manual, etc.