TY  - BOOK
AU  - Chapman,Brian NPlasma etching
TI  - Glow discharge processes: sputtering and plasma etching 
SN  - 047107828X
PY  - 1980///
CY  - New York
PB  - Wiley
KW  - Sputtering (Physics)
KW  - Glow discharges
N1  - 'A Wiley-Interscience publication.'; Includes bibliographical references and index
ER  -