Chapman, Brian NPlasma etching <br/><br/>
Glow discharge processes :  sputtering and plasma etching / 
Brian Chapman 
 - New York :  Wiley,  1980 
 - 406p. :  ill. ;  24 cm. 
<br/><br/> 'A Wiley-Interscience publication.' 
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>047107828X  26.95 (est.) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Sputtering (Physics)<br/>Glow discharges