TY  - BOOK
AU  - Riedling,Karl,1948
TI  - Ellipsometry for Industrial applications
SN  - 321182040X
PY  - 1988///
CY  - Wien, Austria
PB  - Springer-Verlag
KW  - Thin films
KW  - Measurement
KW  - Ellipsometary
KW  - Industrial applications
N1  - Includes index
ER  -