TY  - BOOK
AU  - Solgaard,Olav
ED  - SpringerLink (Online service)
TI  - Photonic microsystems: micro and nanotechnology applied to optical devices and systems 
SN  - 9780387683515
U1  - 621.381045 22
PY  - 2009///
CY  - Boston, MA
PB  - Springer-Verlag US
KW  - Microelectromechanical systems
KW  - Photonics
KW  - Optoelectronic devices
KW  - Design and construction
KW  - Optical communications
KW  - Nanotechnology and Microengineering
KW  - Applied Optics, Optoelectronics, Optical Devices
KW  - Circuits and Systems
UR  - https://eresourcesptsl.ukm.remotexs.co/user/login?url=http://dx.doi.org/10.1007/978-0-387-68351-5
ER  -