Solgaard, Olav. <br/><br/>
Photonic microsystems  micro and nanotechnology applied to optical devices and systems /  [electronic resource] : 
by Olav Solgaard. 
 - Boston, MA :  Springer-Verlag US,  2009. 
 - xvi, 631 pages :  illustrations, digital. 
 - MEMS reference shelf,  1936-4407 .
<br/><br/><label>ISBN: </label>9780387683515 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems.<br/>Photonics.<br/>Optoelectronic devices--Design and construction.<br/>Optical communications.<br/>Nanotechnology and Microengineering.<br/>Applied Optics, Optoelectronics, Optical Devices.<br/>Circuits and Systems.
<br/><br/><label>Dewey Class. No.: </label>621.381045