TY - BOOK AU - Zribi,Anis AU - Fortin,Jeffrey ED - SpringerLink (Online service) TI - Functional thin films and nanostructures for sensors: synthesis, physics and applications SN - 9780387686097 (electronic bk.) AV - TK7872.T55 F86 2009 U1 - 621.38152 22 PY - 2009/// CY - Boston, MA PB - Springer-Verlag US KW - Thin film devices KW - Nanoelectromechanical systems KW - Detectors KW - Nanotechnology KW - Material Science KW - Characterization and Evaluation of Materials KW - Electronics and Microelectronics, Instrumentation KW - Surfaces and Interfaces, Thin Films KW - Optical and Electronic Materials UR - https://eresourcesptsl.ukm.remotexs.co/user/login?url=http://dx.doi.org/10.1007/b138612 ER -