Functional thin films and nanostructures for sensors  synthesis, physics and applications /  [electronic resource] : 
edited by Jeffrey Fortin, Anis Zribi. 
 - Boston, MA :  Springer-Verlag US,  2009. 
 - xvii, 213 p. :  ill., digital ;  24 cm. 
 - Integrated analytical systems .
<br/><br/><label>ISBN: </label>9780387686097 (electronic bk.) 9780387362298 (paper) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Thin film devices.<br/>Nanoelectromechanical systems.<br/>Detectors.<br/>Nanotechnology.<br/>Material Science.<br/>Characterization and Evaluation of Materials.<br/>Electronics and Microelectronics, Instrumentation.<br/>Surfaces and Interfaces, Thin Films.<br/>Optical and Electronic Materials.
<br/><br/><label>LC Class. No.: </label>TK7872.T55  / F86 2009 
<br/><br/><label>Dewey Class. No.: </label>621.38152