TY  - BOOK
AU  - Kozicki,M.
AU  - Hoenig,Stuart A.
AU  - Robinson,P.J.
TI  - Cleanrooms: facilities and practices 
SN  - 0442319509
PY  - 1991///
CY  - New York
PB  - Van Nostrand Reinhold
KW  - Clean rooms
N1  - Includes index
ER  -