TY  - BOOK
AU  - Brewer,George R.
TI  - Electron-beam technology in microelectronic fabrication
SN  - 012133550X
PY  - 1980///
CY  - New York
PB  - Academic Press
KW  - Microelectronics
KW  - Lithography, Electron beam
N1  - Includes bibliographies and index
ER  -