Electron-beam technology in microelectronic fabrication / 
edited by George R. Brewer 
 - New York :  Academic Press,  1980 
 - 362 p. :  ill. ;  23 cm. 
<br/><br/>Includes bibliographies and index 
<br/><br/><label>ISBN: </label>012133550X  24.95 (est.) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectronics<br/>Lithography, Electron beam