Electron beam testing technology / 
edited by John T. L. Thong 
 - New York :  Plenum Press,  1993 
 - 462 p. :  ill. ;  25 cm. 
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>0306443600  RM229.76 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors--Testing<br/>Electron beams--Industrial applications<br/>Scanning electron microscopes