TY  - BOOK
AU  - Badariah Bais,
AU  - Burhanuddin Yeop Majlis,
AU  - Rosminazuin Ab. Rahim,
TI  - Piezoresistive microcantilever biosensor fabrication process development
SN  - 9789672517795
PY  - 2022///
CY  - Bangi, Selangor
PB  - Penerbit Universiti Kebangsaan Malaysia
KW  - Biosensors
KW  - Biosensor industry
KW  - Microfabrication
N1  - Includes bibliographical references (pages [225]-236) and index; Microsensors in biosensing -- Microcantilever biosensor -- Technology and theory -- Design and simulation -- Fabrication process development -- Performance and functionality -- Way forward
ER  -