Piezoresistive microcantilever biosensor fabrication process development - Badariah Bais; Burhanuddin Yeop Majlis; Rosminazuin Ab. Rahim (Bangi, Selangor : Penerbit Universiti Kebangsaan Malaysia, 2022)
Microsensors in biosensing -- Microcantilever biosensor -- Technology and theory -- Design and simulation -- Fabrication process development -- Performance and functionality -- Way forward.
Includes bibliographical references (pages [225]-236) and index.
Keywords: Biosensors; Biosensor industry; Microfabrication