TY  - BOOK
AU  - Seshan,Krishna
AU  - Schepis,Dominic
TI  - Handbook of thin film deposition
SN  - 9780128123119
PY  - 2018///
CY  - Oxford
PB  - Elsevier
KW  - Thin films
KW  - Thin film devices
KW  - Design and construction
N1  - Includes bibliographical references : 435-437 and index
ER  -