Handbook of thin film deposition / 
 Thin film deposition. 
edited by Krishna Seshan, Dominic Schepis. 
 - Fourth edition. 
 - xxi, 448 pages :  illustrations ;  24 cm. 
<br/><br/>Includes bibliographical references : 435-437 and index. 
<br/><br/><label>ISBN: </label>9780128123119  RM834.00 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Thin films.<br/>Thin film devices--Design and construction.