Pal, Prem, e author. <br/><br/>
Silicon wet bulk micromachining for MEMS / 
Prem Pal, Kazuo Sato. 
 - xii, 424 pages :  ilustrations (some color) ;  24 cm. 
<br/><br/>Includes bibliogarphical references and index. 
<br/><br/><label>ISBN: </label>9789814613729  RM540.58 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems.<br/>Micromachining.