TY - BOOK AU - Saat Shukri Embong, TI - Design development and material characterisation of NEMS based pressure sensor PY - 2016/// KW - Universiti Kebangsaan Malaysia KW - Dissertations KW - Nanoelectromechanical systems KW - Design and construction KW - Microelectromechanical systems KW - Mechanical engineering KW - Dissertations, Academic KW - Malaysia N1 - Thesis (Ph.D) - Universiti Kebangsaan Malaysia, 2016; References : page 150-160 ER -