Design development and material characterisation of NEMS based pressure sensor - Saat Shukri Embong (2016)
Thesis (Ph.D) - Universiti Kebangsaan Malaysia, 2016.
References : page 150-160.
Keywords: Universiti Kebangsaan Malaysia -- Dissertations; Nanoelectromechanical systems -- Design and construction; Microelectromechanical systems; Mechanical engineering; Dissertations, Academic -- Malaysia