Saat Shukri Embong, <br/><br/>
Design development and material characterisation of NEMS based pressure sensor / 
Saat Shukri Embong. 
 - xviii, 169 pages :  illustrations ;  30 cm. 
<br/><br/>Thesis (Ph.D) - Universiti Kebangsaan Malaysia, 2016. 
<br/><br/>References : page 150-160. 
<br/><br/><label>Subjects--Corporate Names: </label><br/>Universiti Kebangsaan Malaysia--Dissertations.
<br/><br/><label>Subjects--Topical Terms: </label><br/>Nanoelectromechanical systems--Design and construction.<br/>Microelectromechanical systems.<br/>Mechanical engineering.<br/>Dissertations, Academic--Malaysia.