TY  - BOOK
AU  - Powell,Ronald A.
TI  - Dry etching for microelectronics
SN  - 0444869050
PY  - 1984///
CY  - Amsterdam
PB  - North-Holland Publishing Company
KW  - Semiconductors
KW  - Etching
KW  - Plasma etching
N1  - Includes bibliographical references and index
ER  -