TY  - BOOK
AU  - Noraini Marsi,
TI  - (3C-SiC) silicon carbide MEMS capacitive pressure sensor for high temperature applications
PY  - 2015///
KW  - Universiti Kebangsaan Malaysia
KW  - Dissertations
KW  - Microelectromechanical systems
KW  - Silicon carbide
KW  - Mechanical engineering
KW  - Dissertations, Academic
KW  - Malaysia
N1  - Thesis (PhD.) - Universiti Kebangsaan Malaysia, 2015; References : page [217]-229
ER  -