(3C-SiC) silicon carbide MEMS capacitive pressure sensor for high temperature applications - Noraini Marsi (2015)
Thesis (PhD.) - Universiti Kebangsaan Malaysia, 2015.
References : page [217]-229.
Keywords: Universiti Kebangsaan Malaysia -- Dissertations; Microelectromechanical systems; Silicon carbide; Mechanical engineering; Dissertations, Academic -- Malaysia