Noraini Marsi, <br/><br/>
(3C-SiC) silicon carbide MEMS capacitive pressure sensor for high temperature applications / 
Noraini binti Marsi. 
 - xxvii, 233 pages :  illustrations (some colour) ;  30 cm. 
<br/><br/>Thesis (PhD.) - Universiti Kebangsaan Malaysia, 2015. 
<br/><br/>References : page [217]-229. 
<br/><br/><label>Subjects--Corporate Names: </label><br/>Universiti Kebangsaan Malaysia--Dissertations.
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems.<br/>Silicon carbide.<br/>Mechanical engineering.<br/>Dissertations, Academic--Malaysia.