TY  - BOOK
AU  - Sarkar,Jaydeep
TI  - Sputtering materials for VLSI and thin film devices
SN  - 9780815515937
AV  - TK7874 .S275 2014
PY  - 2014///
CY  - Waltham, USA
PB  - Elsevier, WA, William Andrew is an imprint of Elsevier
KW  - Microelectronics
KW  - Materials
KW  - Flat panel displays
KW  - Sputtering (Physics)
N1  - Includes bibliographical references and index
ER  -