Sarkar, Jaydeep  (Materials scientist), <br/><br/>
Sputtering materials for VLSI and thin film devices / 
Jaydeep Sarkar. 
 - x, 603 pages :  illustrations ;  25 cm 
<br/><br/>Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>9780815515937 0815515936 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectronics--Materials.<br/>Flat panel displays--Materials.<br/>Sputtering (Physics)
<br/><br/><label>LC Class. No.: </label>TK7874  / .S275 2014