Yoo, Chue San. <br/><br/>
Semiconductor manufacturing technology / 
Chue San Yoo. 
 - Singapore :  World Scientific,  2008. 
 - xii, 470 p. :  ill. ;  24 cm. 
 - Advanced series in electrical and computer engineering ;  v. 13. .
<br/><br/>Includes bibliographical references and index. 
<br/><br/>
<br/><br/><label>ISBN: </label>9789812568236 (hbk.)  RM342.27 9812568239 (hbk.) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors--Design and construction.<br/>Semiconductor industry.