TY  - BOOK
TI  - Nanolithography: the art of fabricating nanoelectronic and nanophotonic devices and systems 
T2  - Woodhead publishing series in electronic and optical materials
SN  - 9780857095008
PY  - 2014///
CY  - Philadelphia, PA
PB  - Woodhead Pub.
KW  - Nanolithography
ER  -