Nanolithography :  the art of fabricating nanoelectronic and nanophotonic devices and systems / 
edited by Martin Feldman. 
 - xxiv, 573 pages :  illustrations ;  24 cm. 
 - Woodhead publishing series in electronic and optical materials ;  no. 42 .
 - Woodhead publishing series in electronic and optical materials ;  no. 42 .
<br/><br/><label>ISBN: </label>9780857095008  RM940.84 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Nanolithography.