TY - GEN AU - Mohammad Yeakub Ali AU - Nurul Amin, AKM AU - Ahsan Ali Khan AU - Mohd Nazrin Md Idriss ED - Malaysia. TI - Development of micro-end milling process for fabricating mems PY - 2010/// CY - Putrajaya PB - Kementerian Pengajian Tinggi Malaysia N1 - PTSL : Koleksi Dokumen ER -