Defect recognition and image processing in semiconductors and devices :  proceedings of the Fifth International Conference, 6-10 September 1993 / 
edited by J. Jimenez 
 - Bristol :  Institute of Physics,  1994 
 - xx, 417 p. :  ill. ;  24 cm. 
 - Institute of Physics conference series ;  135 .
<br/><br/><label>ISBN: </label>0750302941  RM392.81 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors--Defects--Congresses<br/>Image processing--Congresses