TY  - BOOK
ED  - International Conference on the Science and Technology of Defect Control in Semiconductors
ED  - Sumino, K.
TI  - Defect control in semiconductors: proceedings of the international conference on the science and technology of defect control in semiconductors, the Yokohama 21st century forum, Yokohama, Japan September 17-22, 1989 
PY  - 1990///
CY  - Amsterdam
PB  - North-Holland
KW  - Semiconductors
KW  - Defects
KW  - Congresses
KW  - Materials
N1  - Includes bibliographical references and indexes
ER  -