TY - BOOK AU - Chiao,Mu AU - Chiao,Jung-Chih TI - Biomaterials for MEMS SN - 9789814241465 (hbk.) PY - 2011/// CY - Singapore PB - Pan Stanford Publishing KW - Microelectromechanical systems KW - Biomedical materials N1 - Includes bibliographical references and index ER -