TY  - BOOK
AU  - Whitehouse,D.J.
AU  - Whitehouse,D.J.
TI  - Handbook of surface and nanometrology
SN  - 9781420082012 (hbk.)
PY  - 2011///
CY  - Boca Raton, Mass.
PB  - CRC Press
KW  - Surfaces (Technology)
KW  - Measurement
N1  - Rev. ed. of: Handbook of surface metrology. c1994; Includes bibliographical references and index
ER  -