TY  - BOOK
AU  - Muhammad Ramdzan Buyong.
TI  - Fabrikasi sensor tekanan kapasitif sangat rendah (STKSR) menggunakan teknologi proses piawai CMOS
PY  - 2010///
KW  - Universiti Kebangsaan Malaysia
KW  - Dissertations
KW  - Dissertations, Academic
KW  - Malaysia
KW  - BioMEMS
KW  - Metal oxide semiconductors
KW  - Detectors
KW  - Microelectronics
KW  - Microelectromechanical systems
KW  - Electromechanical devices
N1  - Tesis (M.Sc.) - Universiti Kebangsaan Malaysia, 2010; Rujukan : p. 194-198
ER  -