Muhammad Ramdzan Buyong.

Fabrikasi sensor tekanan kapasitif sangat rendah (STKSR) menggunakan teknologi proses piawai CMOS / Muhammad Ramdzan bin Buyong. - 2010. - xxvi, 201 p. : ill. charts, photographs, ; 30 cm.

Tesis (M.Sc.) - Universiti Kebangsaan Malaysia, 2010.

Rujukan : p. 194-198.


Universiti Kebangsaan Malaysia--Dissertations.


Dissertations, Academic--Malaysia.
BioMEMS.
Metal oxide semiconductors.
Detectors.
Microelectronics.
Microelectromechanical systems.
Electromechanical devices.