Muhammad Ramdzan Buyong. Fabrikasi sensor tekanan kapasitif sangat rendah (STKSR) menggunakan teknologi proses piawai CMOS / Muhammad Ramdzan bin Buyong. - 2010. - xxvi, 201 p. : ill. charts, photographs, ; 30 cm. Tesis (M.Sc.) - Universiti Kebangsaan Malaysia, 2010. Rujukan : p. 194-198. Subjects--Corporate Names: Universiti Kebangsaan Malaysia--Dissertations. Subjects--Topical Terms: Dissertations, Academic--Malaysia.BioMEMS.Metal oxide semiconductors.Detectors.Microelectronics.Microelectromechanical systems.Electromechanical devices.