Nano-lithography / 
edited by Stefan Landis. 
 - Hoboken, NJ :  Wiley,  2011. 
 - xxv, 325 p. :  ill. ;  24 cm. 
<br/><br/>Includes bibliographical references and index. 
<br/><br/>Ch. 1. X-ray lithography : fundamentals and applications -- ch. 2. NanoImprint lithography -- ch. 3. Lithography techniques using scanning probe microscopy -- ch. 4. Lithography and manipulation based on the optical properties of metal nanostructures -- ch. 5. Patterning with self-assembling block copolymers -- ch. 6. Metrology for lithography. 
<br/><br/><label>ISBN: </label>9781848212114 (hbk.)  RM375.28 1848212119 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microlithography.<br/>Nanotechnology.