TY  - BOOK
AU  - Kohli,Rajiv
AU  - Mittal,Kashmiri L.
TI  - Developments in surface contamination and cleaning
T2  - Developments in surface contamination and cleaning series
SN  - 9781437778304
PY  - 2008///-
CY  - Amsterdam
PB  - Elsivier
KW  - Surfaces (Technology)
KW  - Surface contamination
KW  - Prevention
KW  - Particles
KW  - Measurement
N1  - Includes references and index; vol. 2; Particle deposition, control and removal -; vol. 7; Cleanliness validation and verification
ER  -