TY  - BOOK
AU  - Reinhardt,Karen A.
AU  - Reidy,Richard F.
TI  - Handbook of cleaning for semiconductor manufacturing: fundamentals and applications 
SN  - 9780470625958 (hbk.)
PY  - 2011///
CY  - Salem, Mass.
PB  - Scrivener
KW  - Semiconductors
KW  - Surfaces
N1  - Includes bibliographical references and index
ER  -