Handbook of cleaning for semiconductor manufacturing :  fundamentals and applications / 
[edited by] Karen A. Reinhardt, Richard F. Reidy. 
 - Salem, Mass. :  Scrivener,  2011 
 - xxii, 590 p. :  ill. ;  26 cm. 
<br/><br/>Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>9780470625958 (hbk.)  RM761.79 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors--Surfaces.