Micromachining using electrochemical discharge phenomenon : fundamentals and applications of spark assisted chemical engraving /
Rolf Wuthrich
- Norwich, NY, USA : W. Andrew, 2009
- xiv, 181 p. : ill. ; 27 cm.
- Micro & nano technologies .
Includes bibliographical references
9780815515876 RM552.60
Micromachining Electrochemical cutting Electric discharges--Industrial applications Plasma etching