Wuthrich, Rolf

Micromachining using electrochemical discharge phenomenon : fundamentals and applications of spark assisted chemical engraving / Rolf Wuthrich - Norwich, NY, USA : W. Andrew, 2009 - xiv, 181 p. : ill. ; 27 cm. - Micro & nano technologies .

Includes bibliographical references

9780815515876 RM552.60


Micromachining
Electrochemical cutting
Electric discharges--Industrial applications
Plasma etching