Radiation defects in ion implanted and/or high-energy irradiated MOS structures /
S. Kaschieva and S.N. Dmitriev.
- New York : Nova Science Publishers, 2010.
- ix, 195 p. : ill. (some col.) ; 24 cm.
- Electrical engineering developments series. .
- Electrical engineering developments series. .
Includes bibliographical references and index.
9781608761883 (hbk.) RM261.13 1608761886 (hbk.)
Metal oxide semiconductors. Semiconductor doping. Semiconductors--Effect of radiation on. Ion implantation.